A novel inductive technique for microcantilever displacement detection
نویسندگان
چکیده
منابع مشابه
Microcantilever Displacement Measurement Using a Mechanically Modulated Optical Feedback Interferometer
Microcantilever motion detection is a useful tool for the characterization of the physical, chemical and biological properties of materials. In the past, different approaches have been proposed and tested to enhance the behavior, size and simplicity of microcantilever motion detectors. In this paper, a new approach to measure microcantilever motion with nanometric resolution is presented. The p...
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ژورنال
عنوان ژورنال: Theoretical and Applied Mechanics Letters
سال: 2011
ISSN: 2095-0349
DOI: 10.1063/2.1103106